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Use of scanning electron microscope for multichannel sampling oscillography
H.P. Feuerbaum (Siemens (Germany)), E. Wolfgang (Siemens (Germany))
Proceedings of the IEEE
DOI: 10.1109/proc.1978.11063 (Engineering)
License: not stated (all rights reserved)
Abstract: A method for measuring two or more waveforms on different metal lines inside an integrated circuit and displaying the result as a stationary image on a CRT screen is described. The finely focused electron beam of a scanning electron microscope serves as a probe with a minimal current load on the sample. For example, two measured waveforms are displayed with a time resolution of 25 ns and a voltage resolution of 500 mV.
Published on 01 Jan. 1978