@misc{sinev2018calculation,
  title={Calculation and selection of silicon to glass anodic bonding modes based on the criterion of minimum residual stress},
  author={Leonid S. Sinev},
  year={2018},
  eprint={1804.08644},
  archivePrefix={arXiv},
  primaryClass={physics.app-ph},
  url={https://arxiv.org/abs/1804.08644}
}