Optimized Fabrication Procedure for High-Quality Graphene-based Moiré Superlattice Devices

AI-generated keywords: Graphene Moiré Superlattice Fabrication Challenges Solutions

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The license of the paper does not allow us to build upon its content and the key points are generated using the paper metadata rather than the full article.

  • The article discusses challenges in creating high-quality graphene-based moiré superlattice devices
  • Moiré superlattices are a versatile platform for studying emergent phenomena from strong correlations and topology
  • Challenges include heterostrain, twist angle disorder, and relaxation during fabrication
  • Authors present an optimized protocol focusing on a modified dry transfer technique in a custom-built setup
  • Protocol includes strict criteria for flake selection, pre-cleaned bottom gates, and graphene laser ablation
  • Meticulous control of the transfer process results in high uniformity and desired twist angles
  • Optimized protocol addresses existing challenges and paves the way for advancements in moiré materials research
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Authors: Shuwen Sun, Pablo Jarillo-Herrero

Journal of Visualized Experiments (221), e68230 (2025)
arXiv: 2507.15853v1 - DOI (cond-mat.mes-hall)
28 pages, 8 figures; for associated video demonstration, see https://www.jove.com/video/68230
License: CC BY-NC-ND 4.0

Abstract: Moir\'e superlattices constitute a versatile platform to investigate emergent phenomena arising from the interplay of strong correlations and topology, while offering flexible in situ tunability. However, the fabrication of such moir\'e superlattices is challenging. It is difficult to achieve highly uniform devices with a precise twist angle because of the unintentional introduction of heterostrain, twist angle disorder, and angle/lattice relaxation during the nanofabrication process. This article introduces an optimized, experience-informed protocol for fabricating high-quality graphene-based moir\'e superlattice devices, focusing on a modified dry transfer technique. The transfer process is performed in a highly tunable, custom-built transfer setup that enables precise position, angle, and temperature control. By combining rigorous flake selection criteria, pre-cleaned bubble-free bottom gates, and graphene laser ablation, the moir\'e superlattice is constructed by deliberately overlaying twisted graphene flakes at a submicron speed at room temperature. Through precise control of the transfer process, the resulting graphene moir\'e superlattice devices exhibit high uniformity and desired twist angles. This optimized protocol addresses existing challenges in the fabrication of graphene-based moir\'e superlattice devices and paves the way for further advances in the rapidly evolving field of moir\'e materials.

Submitted to arXiv on 21 Jul. 2025

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Results of the summarizing process for the arXiv paper: 2507.15853v1

This paper's license doesn't allow us to build upon its content and the summarizing process is here made with the paper's metadata rather than the article.

The article "Optimized Fabrication Procedure for High-Quality Graphene-based Moiré Superlattice Devices" by Shuwen Sun and Pablo Jarillo-Herrero delves into the challenges and solutions involved in creating high-quality graphene-based moiré superlattice devices. These superlattices serve as a versatile platform for studying emergent phenomena resulting from strong correlations and topology, with the added benefit of being able to be tuned in situ. However, achieving uniform devices with precise twist angles has been hindered by factors such as heterostrain, twist angle disorder, and relaxation during fabrication. To address these challenges, the authors present an optimized protocol based on their experience. The focus of this protocol is on a modified dry transfer technique carried out in a custom-built transfer setup that allows for precise control over position, angle, and temperature. By implementing strict criteria for flake selection and using pre-cleaned bubble-free bottom gates, along with employing graphene laser ablation, the researchers are able to construct moiré superlattices by intentionally overlaying twisted graphene flakes at a submicron speed under room temperature conditions. Through meticulous control of the transfer process, the resulting graphene moiré superlattice devices demonstrate high uniformity and achieve desired twist angles. This optimized protocol not only addresses existing challenges in fabricating graphene-based moiré superlattice devices but also opens up possibilities for further advancements in this rapidly evolving field of moiré materials. The study provides valuable insights into overcoming fabrication obstacles and lays a solid foundation for future research in this area.
Created on 22 Jul. 2025

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