Through-chip microchannels for three-dimensional integrated circuits cooling

AI-generated keywords: Cooling High-power electronics Multilayer integrated circuits Through-chip microchannels Computational fluid dynamics

AI-generated Key Points

  • Cooling high-power electronics in multilayer integrated circuits (ICs) is a challenging task
  • A new study proposes designing through-chip microchannels (TCMCs) for direct cooling
  • TCMCs are organized in a square array and water circulates inside them
  • Computational fluid dynamics (CFD) simulations optimize the cooling performance
  • Results show that a pitch of 10 μm and a radius of 1 μm provide optimal cooling
  • Cooling properties do not change with the number of layers for a given chip thickness
  • Implementing TCMCs could lead to advancements in multilayer 3D ICs and high-power electronics.
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Authors: Lihong Ao, Aymeric Ramiere

Thermal Science and Engineering Progress, 102333 (2024)
arXiv: 2307.16495v2 - DOI (physics.flu-dyn)
License: CC BY 4.0

Abstract: Cooling high-power electronics in multilayer integrated circuits (ICs) is challenging for existing cooling methods. In this work, we designed through-chip microchannels (TCMCs) that cross the entire chip perpendicularly to the layers, with water circulating inside to provide direct cooling to each layer. TCMCs are organized in a square array where the pitch and radius of the microchannels are explored. Our computational fluid dynamics (CFD) simulations show that a pitch 10 {\mu}m and a radius 1 {\mu}m optimize the cooling performance to support a power higher than 10^4 W/cm2 while the maximum temperature rise remains below 60 K with a water inlet temperature of 300 K. We show that the cooling properties do not change with the number of layers for a given chip thickness which provides flexibility to the functional design of the chip. Though manufacturing may be challenging, TCMCs offer a new way for chip cooling that could provide a leap forward in the performance of multilayer 3D ICs and high-power electronics.

Submitted to arXiv on 31 Jul. 2023

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Results of the summarizing process for the arXiv paper: 2307.16495v2

Cooling high-power electronics in multilayer integrated circuits (ICs) is a challenging task for existing cooling methods. However, a new study proposes a solution by designing through-chip microchannels (TCMCs) that cross the entire chip perpendicularly to the layers, with water circulating inside to provide direct cooling to each layer. The TCMCs are organized in a square array, and the researchers explore the pitch and radius of the microchannels. Computational fluid dynamics (CFD) simulations are conducted to optimize the cooling performance. The results show that a pitch of 10 μm and a radius of 1 μm provide optimal cooling, supporting a power higher than 10^4 W/cm2 while keeping the maximum temperature rise below 60 K with a water inlet temperature of 300 K. One interesting finding is that the cooling properties do not change with the number of layers for a given chip thickness. This provides flexibility in the functional design of the chip without compromising its cooling efficiency. Although manufacturing TCMCs may pose some challenges, they offer a promising new approach to chip cooling. Implementing TCMCs could potentially lead to significant advancements in the performance of multilayer 3D ICs and high-power electronics. In addition to this summary, more detailed information about various parameters related to TCMCs and their impact on cooling performance is provided. These parameters include length of microchannels, number of layers, unit vector, pressure, velocity, slip velocity on walls, tangential wall stress, heat source power density, heat source volume power density, frictional power density, fluid pumping power density, fluid volume power density, heat flux density,temperature profiles including maximum temperature and average temperature rise at outlet points. Other relevant parameters such as specific heat of water, tangential accommodation momentum coefficient mean free path of water viscosity of water thermal conductivity of water and mass flux density are also discussed. Overall this study presents a comprehensive analysis of TCMCs for cooling high-power electronics in multilayer ICs. The findings highlight the potential of TCMCs as a new and efficient cooling method, which could have significant implications for the performance and design of future electronic devices.
Created on 03 Feb. 2024

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